Together these factors determine the depth of focus 这些因素综合起来决定了景深。
A novel method for measuring dense-line depth of focus ( DOF) of a lithographic projection system is proposed. 提出了一种检测光刻机投影物镜密集线焦深(DOF)的新技术。
A new technology of large depth of focus of incoherent optical systems 扩大光学系统焦深范围的光学成象新技术研究
As a resolution enhancement technique ( RET), off-axis illumination ( OAI) can enhance resolution and improve depth of focus ( DOF) through adjusting illumination. 作为分辨率增强技术(RET)之一,离轴照明技术(OAI)通过调整照明方式,不但能提高分辨率还能很好地改善焦深。
It is pointed out that the depth of focus, diffraction from aperture and radiation scattering are three main sources for image blurring of CCD receiving system. 指出了景深、可见光衍射、辐射输运是CCD图像接收系统模糊效应的3个影响因素。
However, there is a trade-off between the high lateral resolution and focusing depth, because high numerical aperture would decreases the depth of focus in the OCT with conventional optical components. 但是,在提高横向分辨率和提高探测光的焦深之间存在矛盾,大数值孔径物镜对应于较小的焦深。
It not only affects process windows, i.e., exposure latitude ( EL) and depth of focus ( DOF), but also degrades mask error factor ( MEF), which can introduce extra mask cost. 它不仅影响工艺窗口,即,曝光容裕度和焦深(DOF),而且也降低了掩模误差因子(MEF),这能导致附加的掩模费用。
On the Control and Application of the Depth of Focus 景深的控制和运用
The property of the large depth of focus imaging system is analyzed with light chart and MTF, and the result is discussed. 从光线图和系统的MTF两个方面对大焦深成像系统的特性进行了分析,并对结果进行了讨论。
Property Study on large depth of focus imaging system 大焦深成像系统的特性研究
The principle of oblique illumination for improving photolithographic resolution and increasing depth of focus is presented with partially coherent theory. 本文用部分相干光成像理论研究了提高分辨力及增大焦深的原理.建立了二元光栅倾斜照明成像数理模型。
MACROSEISMIC method determining depth of focus taking into account absorption 考虑吸收时确定震源深度的宏观地震方法
Exposure energy, improvement of resolution and depth of focus are compared with that of conventional condition. 主要就曝光能量,分辨力改善情况,焦深变化等与传统情况作了比较。
By inserting a piece of pupil phase mask in the pupil plane of an optical system, the wavefront coding technique can increase the depth of focus by an order, and the focus-elated aberrations can also be corrected. 波前编码技术通过在光学系统的出瞳面加入一个非球面透镜,使光学系统的焦深增加一个数量级,并能够校正由各种原因的离焦引起的像差。
Research of the extension of the depth of focus based on hybrid optical digital wavefront coding technique 基于波前编码的光数混合景深延拓技术的研究
In-Situ Measurement Method of Dense-Line Depth of Focus of a Lithographic Projection System 基于光学对准的光刻机投影物镜密集线焦深原位检测技术
First experimental data on imaging demonstrated a large gain of depth of focus ( DOF), while maintaining image contrast at high scan speed. 最初的浸液式曝光实验数据证明了焦深的增加较大,同时以高扫描速度保持了图像的对比度。
お? Placing a diffractive optical element ( DOE) on the incident laser beam to improve the depth of focus, the DOE'S aperture is variable. 在入射光束的孔径受限制的情况下,利用衍射光学元件来增加激光束的焦深。
Differential Haar-Gaussian wavelet transform and its application to edge detection with large depth of focus 微分Haar-Gaussian小波变换在大景深物体边缘测量中的应用
Research on an Iris Capturing Technology by Extending the Depth of Focus 扩大焦深的虹膜采集方法及实现技术研究
Depth of focus is a very important earthquake parameter. 震源深度是地震定位的一个重要参数。
The aerial image qualities of depth of focus ( DOF) and optical proximity effect are simulated with the lithography simulation software PROLITH. 利用光刻仿真软件PROLITH,进行了掩模版空间成像的焦深(DOF)和光学临近效应的仿真。
Lithography process, depth of focus of the lithography objective lens is often only a few microns to tens of microns, it is not an easy task to find the focal plane, if the focal plane was not identified, the exposure quality was seriously affected. 光刻工艺中,光刻物镜的焦深往往只有几微米到几十微米左右,寻找焦面并非件轻而易举的事,若焦面未找准,会导致光刻图形模糊不清,严重影响曝光质量。
Then according to the 1/ 4 wave-imaging-difference limitation of the ideal imaging, the depth of focus of Fresnel digital holography is analyzed further from the off-focusing phase error. The difference between the two methods to evaluate the depth of focus is one third. 然后根据理想成像四分之一波长的波像差限制,从离焦再现位相误差角度对菲涅耳数字全息的焦深作了进一步分析,结果与用再现像强度判据得到的焦深相差近三分之一。
Illumination system, as one of the main parts of lithography, enables to supply high uniformity intensity distribution on the mask, controls exposure dose and creates off-axis illumination ( OAI) modes which enhance the resolution and enlarge depth of focus of lithography. 照明系统是光刻机的重要组成部分,其主要作用是提供高均匀性照明、控制曝光剂量和实现离轴照明,以提高光刻分辨率和增大焦深。
The major works are as follows: 1. Based on the theoretical analysis and numerical calculation, the depth of focus and the extension rate of depth-of-focus in the wavefront coding system with a cubic phase mask is reviewed and analyzed. 2. 论文主要完成了以下几个方面的工作:1.在理论分析波前编码成像系统的机理和计算方法的基础上,对三次位相编码系统的焦深和焦深拓展率进行了理论分析。
The technique is not only extending the depth of focus but also decreasing the cost and increasing the allowable error of the system. 该项技术不但可以增加光学系统的焦深,也能够通过去除系统光学面的方法降低系统成本、提高系统装配允差和系统对环境的适应性。
Because of its larger depth of focus and higher penetration power, hard X-ray microscopy can overcome the limitation of soft x-ray microscopy which has difficulty in imaging thick cells. 而硬X射线显微术因为焦深大、穿透能力强,因此可以克服软X射线显微术难以成像较厚细胞的缺陷,具有重要的应用价值。
It is indicated that the depth of focus of the digital holographic imaging system is not only related with the numerical aperture and the reference wavelength, but also related with the configuration and the offset of reference wave. 指出了数字全息成像系统的焦深不仅与记录时的数值孔径及参考光波长有关,还与具体的光路结构及参考光的偏置有关。
The results showed that all the configurations such as response time, the focal spot size, and the depth of focus, etc, have reached the expectation. Finally, a summary of the thesis and a suggestion for future work were given. 结果表明,液晶器件的电控响应时间,焦斑尺寸,焦深等性能指标都达到了预期目标。最后,对全文工作进行了总结,对后续工作提出了展望和建议。